Slurry production

Monitoring the properties of the slurry

A slurry is a mixture of solids that is used in chemical-mechanical polishing to smooth surfaces. Slurries are especially used for wafer production, which requires chemical etching and abrasive polishing. The  Schmidt + Haensch inline refractometer is suitable for monitoring the properties of the slurry while producing it.

Suggested Products

iPR FR2
Full-range inline measurements

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